Study of interface impurity sputtering in partially ionized...

Journal of Applied Physics 1990 Vol. 68; Iss. 7

Study of interface impurity sputtering in partially ionized beam deposition of Cu on Si

Bai, P., Yang, G.-R., Lu, T.-M.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346323
File:
PDF, 933 KB
english, 1990
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