Improvements in electrical properties of (Ba,Sr)TiO[sub 3]...

Improvements in electrical properties of (Ba,Sr)TiO[sub 3] capacitor with chemical vapor deposited Pt top electrode using Pt hexafluoroacetylacetonate

Lee, Jong Myeong, Kang, Sang Yeol, Shin, Ju Cheol, Kim, Won Joon, Hwang, Cheol Seong, Kim, Hyeong Joon
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Volume:
74
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.124139
File:
PDF, 324 KB
english, 1999
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