Quantitative extraction of in-plane surface properties...

Quantitative extraction of in-plane surface properties using torsional resonance mode of atomic force microscopy

Song, Yaxin, Bhushan, Bharat
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1876576
File:
PDF, 331 KB
english, 2005
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