Analysis of lattice defects induced by ion implantation...

Journal of Applied Physics 1994 Vol. 76; Iss. 10

Analysis of lattice defects induced by ion implantation with photo-acoustic displacement measurements

Sumie, Shingo, Takamatsu, Hiroyuki, Morimoto, Tsutomu, Nishimoto, Yoshiro, Kawata, Yutaka, Horiuchi, Takefumi, Nakayama, Hiroshi, Kita, Takashi, Nishino, Taneo
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Volume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357074
File:
PDF, 1.29 MB
english, 1994
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