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Liquid junctions for characterization of electronic materials. V. Comparison with solid-state devices used to characterize reactive ion etching of Si
Fantini, M. C. A., Shen, Wu-Mian, Tomkiewicz, Micha, Gambino, J. P.Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343801
File:
PDF, 1.02 MB
english, 1989