X-ray mask distortion analysis using the boundary element...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1990 / 5 Vol. 8; Iss. 3

X-ray mask distortion analysis using the boundary element method

Ohki, Shigehisa
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Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585042
Date:
May, 1990
File:
PDF, 701 KB
english, 1990
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