Virtual integrated processing for integrated circuit manufacturing
Chalupa, Radek, Jiang, Lei, Simka, Harsono, Shankar, Sadasivan, Thakurta, DiptoVolume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2731341
File:
PDF, 755 KB
english, 2007