Characterization of Contact Resistance Stability in MEM...

Journal of Microelectromechanical Systems 2012 / 06 Vol. 21; Iss. 3

Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes

Chen, Yenhao, Nathanael, Rhesa, Jeon, Jaeseok, Yaung, Jack, Hutin, Louis, Liu, Tsu-Jae King
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Volume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2186282
Date:
June, 2012
File:
PDF, 494 KB
english, 2012
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