Microhardness and lattice parameter of Cr[sub 1−x]Al[sub...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 2

Microhardness and lattice parameter of Cr[sub 1−x]Al[sub x]N films

Kawate, Masahiro, Kimura, Ayako, Suzuki, Tetsuya
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1448510
File:
PDF, 459 KB
english, 2002
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