Design and Fabrication of a Novel MEMS Capacitive...

IEEE Transactions on Electron Devices 2014 / 03 Vol. 61; Iss. 3

Design and Fabrication of a Novel MEMS Capacitive Transducer With Multiple Moving Membrane, ${\rm M}^{3}$-CMUT

Emadi, Tahereh Arezoo, Buchanan, Douglas A.
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2013.2297677
Date:
March, 2014
File:
PDF, 1.64 MB
english, 2014
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