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Pumping characteristics of sputter ion pumps with high-magnetic-flux densities in an ultrahigh-vacuum range
Ohara, KenjiVolume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577822
Date:
September, 1992
File:
PDF, 605 KB
english, 1992