Internal stresses in TiN/Ti multilayer coatings deposited by large area filtered arc deposition
Cheng, Y. H., Browne, T., Heckerman, B., Jiang, J. C., Meletis, E. I., Bowman, C., Gorokhovsky, V.Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3006136
File:
PDF, 508 KB
english, 2008