Hafnium Oxide Based CMOS Compatible Ferroelectric Materials

ECS Journal of Solid State Science and Technology 2013 / 01 Vol. 2; Iss. 4

Hafnium Oxide Based CMOS Compatible Ferroelectric Materials

Schroeder, U., Mueller, S., Mueller, J., Yurchuk, E., Martin, D., Adelmann, C., Schloesser, T., van Bentum, R., Mikolajick, T.
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Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.010304jss
Date:
January, 2013
File:
PDF, 1001 KB
english, 2013
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