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Characterization of Resonant Behavior and Sensitivity Using Micromachined PZT Cantilever
Lee, Jeong Hoon, Yoon, Ki Hyun, Kim, Tae SongVolume:
50
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/743817705
Date:
January, 2002
File:
PDF, 324 KB
english, 2002