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Experimental evidence for nanoparticle deposition in continuous argon–silane plasmas: Effects of silicon nanoparticles on film properties
Roca i Cabarrocas, PereVolume:
14
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580162
Date:
March, 1996
File:
PDF, 345 KB
english, 1996