Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Bogdanowicz, Janusz, Dortu, Fabian, Clarysse, Trudo, Vandervorst, Wilfried, Salnik, AlexVolume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3504652
File:
PDF, 1.68 MB
english, 2010