Top-down structure and device fabrication using in situ...

Applied Physics Letters 2005 Vol. 87; Iss. 23

Top-down structure and device fabrication using in situ nanomachining

Li, Xiaodong, Wang, Xinnan, Xiong, Qihua, Eklund, Peter C.
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Volume:
87
Year:
2005
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2139991
File:
PDF, 636 KB
english, 2005
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