Nitrogen actinometry for measurement of nitrogen radical...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 3

Nitrogen actinometry for measurement of nitrogen radical spatial distribution in large-area plasma-enhanced chemical vapor deposition

Oh, Changhoon, Kang, Minwook, Nam, Seungsuk, Hahn, Jae W.
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4798772
File:
PDF, 901 KB
english, 2013
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