Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
Wan, Ling-Shu, Rincon Delgadillo, Paulina A., Gronheid, Roel, Nealey, Paul F.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4818882
File:
PDF, 4.26 MB
english, 2013