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Directed self-assembly of ternary blends of block copolymer...

Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

Wan, Ling-Shu, Rincon Delgadillo, Paulina A., Gronheid, Roel, Nealey, Paul F.
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4818882
File:
PDF, 4.26 MB
english, 2013
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