Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 07 Vol. 32; Iss. 4
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Access devices for 3D crosspoint memorya)
Burr, Geoffrey W., Shenoy, Rohit S., Virwani, Kumar, Narayanan, Pritish, Padilla, Alvaro, Kurdi, Bülent, Hwang, HyunsangVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4889999
Date:
July, 2014
File:
PDF, 8.24 MB
english, 2014