Structure of interfaces in a-SiH/a-SiNxH superlattices

Journal of Applied Physics 1991 Vol. 69; Iss. 2

Structure of interfaces in a-SiH/a-SiNxH superlattices

Santos, P. V., Hundhausen, M., Ley, L., Viczian, C.
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Volume:
69
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.347364
File:
PDF, 1.29 MB
english, 1991
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