Energy and momentum transport by sputtered and reflected...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1987 / 7 Vol. 5; Iss. 4

Energy and momentum transport by sputtered and reflected streams in a glow discharge

Gras-Marti, Alberto
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Volume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.574960
Date:
July, 1987
File:
PDF, 817 KB
english, 1987
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