Impact of gas heating in inductively coupled plasmas

Journal of Applied Physics 2001 Vol. 90; Iss. 5

Impact of gas heating in inductively coupled plasmas

Hash, D. B., Bose, D., Rao, M. V. V. S., Cruden, B. A., Meyyappan, M., Sharma, S. P.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1390503
File:
PDF, 770 KB
english, 2001
Conversion to is in progress
Conversion to is failed