![](/img/cover-not-exists.png)
An enhanced sensitivity null ellipsometry technique for studying films on substrates: Application to silicon nitride on gallium arsenide
Alterovitz, Samuel A., Bu-Abbud, George H., Woollam, John A., Liu, David C.Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332137
File:
PDF, 988 KB
english, 1983