![](/img/cover-not-exists.png)
[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Disposable PDMS Diaphragm Micropump Actuated by PZT
Geng, Zhao-xin, Cui, Da-fu, Wang, Hai-ning, Chen, XingYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334783
File:
PDF, 3.73 MB
english, 2006