[IEEE 2013 13th International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2013.06.6-2013.06.7)] 2013 13th International Workshop on Junction Technology (IWJT) - Integration of millisecond and spike anneals for dopant activation optimization
Sun, Shiyu, Sharma, Shashank, Rao, K. V., Ng, Ben, Kouzminov, Dimitry, Colombeau, Ben, Variam, Naushad, Muthukrishnan, Shankar, Mayur, Abhilash, Brand, AdamYear:
2013
Language:
english
DOI:
10.1109/iwjt.2013.6644512
File:
PDF, 872 KB
english, 2013