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[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - In-line electrical characterization of ultrathin gate dielectric films
Cubaynes, F., Passefort, S., Eason, K., Xiafang Zhang,, Date, L., Pique, D., Conard, T., Rothschild, A., Schaekers, M.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001563
File:
PDF, 405 KB
english, 2002