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Miniaturized multipurpose cell for in situ investigation of sputtered thin films with x-ray techniques
Lützenkirchen-Hecht, D., Bruder, K., Haake, U., Keil, P., Markert, C., Ringpfeil, C., Frahm, R.Volume:
76
Year:
2005
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1942529
File:
PDF, 687 KB
english, 2005