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Effects of post-deposition annealing ambient on the electrical characteristics and phase transformation kinetics of sputtered lead zirconate titanate (65/35) thin film capacitors
Chikarmane, VinayVolume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578045
Date:
July, 1992
File:
PDF, 970 KB
english, 1992