[IEEE 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005. - Shangri-La's Rasa Sentosa Resort, Singapore (27 June-1July, 2005)] Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005. - A study of defects causing yield loss in copper backend process due to the power shorts
Kamat, N.R., Lal, M., Oh Chong Khiam,Year:
2005
Language:
english
DOI:
10.1109/ipfa.2005.1469177
File:
PDF, 1.55 MB
english, 2005