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Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas
Edamura, Manabu, Benck, Eric C., Wang, YichengVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2359736
File:
PDF, 723 KB
english, 2006