Spatial and spectral characterization of a laser produced...

Review of Scientific Instruments 2004 Vol. 75; Iss. 11

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

Legall, H., Stiel, H., Vogt, U., Schönnagel, H., Nickles, P.-V., Tümmler, J., Scholz, F., Scholze, F.
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Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1807567
File:
PDF, 1.04 MB
english, 2004
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