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[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - Ultra-low series resistance W/ErSi2/n+-Si and W/Pd2Si/p+-Si S/D electrodes for advanced CMOS platform
Kuroda, Rihito, Tanaka, Hiroaki, Nakao, Yukihisa, Teramoto, Akinobu, Miyamoto, Naoto, Sugawa, Shigetoshi, Ohmi, TadahiroYear:
2010
Language:
english
DOI:
10.1109/iedm.2010.5703425
File:
PDF, 1.38 MB
english, 2010