Reactor-scale models for rf diode sputtering of metal thin...

Reactor-scale models for rf diode sputtering of metal thin films

Desa, S., Ghosal, S., Kosut, R. L., Ebert, J. L., Abrahamson, T. E., Kozak, A., Zou, D. W., Zhou, X., Groves, J. F., Wadley, H. N. G.

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.581705

File:

PDF, 913 KB

english, 1999

Conversion to is in progress

Conversion to is failed