Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 1
Interfacial properties of HfO[sub 2] dielectric film on Ge substrate
He, Dawei, Cheng, Xinhong, Xu, Dawei, Wang, Zhongjian, Yu, Yuehui, Sun, Qingqing, Zhang, David WeiVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3521500
File:
PDF, 422 KB
english, 2011