Origin of crystalline quality deterioration in epitaxial...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 4

Origin of crystalline quality deterioration in epitaxial growth of CeO[sub 2] layers on Si substrates

Inoue, Tomoyasu, Sakamoto, Naomichi, Horikawa, Akihiro, Takakura, Hirofumi, Takahashi, Kosei, Ohashi, Masayuki, Shida, Shigenari
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1564034
File:
PDF, 687 KB
english, 2003
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