A Novel Low-Temperature Polysilicon Thin-Film Transistors...

IEEE Electron Device Letters 2007 / 09 Vol. 28; Iss. 9

A Novel Low-Temperature Polysilicon Thin-Film Transistors With a Self-Aligned Gate and Raised Source/Drain Formed by the Damascene Process

Kow Ming Chang,, Gin Min Lin,, Guo Liang Yang,
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.903313
Date:
September, 2007
File:
PDF, 360 KB
english, 2007
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