![](/img/cover-not-exists.png)
A Novel Low-Temperature Polysilicon Thin-Film Transistors With a Self-Aligned Gate and Raised Source/Drain Formed by the Damascene Process
Kow Ming Chang,, Gin Min Lin,, Guo Liang Yang,Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.903313
Date:
September, 2007
File:
PDF, 360 KB
english, 2007