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Analysis of oxide–nitride–oxide/Si(111) interfaces by optical second harmonic generation and secondary ion mass spectroscopy
Watanabe, Kohji, Kawata, Masato, Hasegawa, Eiji, Hirayama, HiroyukiVolume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.361780
File:
PDF, 396 KB
english, 1996