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Comparison of saturation current characteristics for ultrathin silicon oxides grown on n- and p-type silicon substrates simultaneously
Wang, Tsung-Miau, Chang, Chia-Hua, Chang, Shu-Jau, Hwu, Jenn-GwoVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2345648
File:
PDF, 345 KB
english, 2006