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Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption–gas chromatography–mass spectrometry
Yuhao Kang, Walter Den, Hsunling Bai, Fu-Hsiang KoVolume:
1070
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.chroma.2005.02.055
File:
PDF, 392 KB
english, 2005