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[IEEE 2006 5th IEEE Conference on Sensors - Daegu (2006.10.22-2006.10.25)] 2006 5th IEEE Conference on Sensors - Contact UV Lithography Simulation for Thick SU-8 Photoresist
Zaifa Zhou,, Qing-An Huang,, Weihua Li,, Ming Fen,, Wei Lu,, Zhen Zhu,Year:
2006
Language:
english
DOI:
10.1109/icsens.2007.355613
File:
PDF, 2.53 MB
english, 2006