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Resistivity changes and phase evolution in W–N films sputter deposited in Ne–N2 and Ar–N2 discharges
Huber, Karl JohnVolume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575277
Date:
May, 1988
File:
PDF, 565 KB
english, 1988