Off-Resonance Low-Pressure Operation of Lorentz Force MEMS Magnetometers
Langfelder, Giacomo, Laghi, Giacomo, Minotti, Paolo, Tocchio, Alessandro, Longoni, AntonioVolume:
61
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/tie.2014.2317153
Date:
December, 2014
File:
PDF, 1.58 MB
english, 2014