Abnormal junction profile of silicided p/sup +//n shallow...

IEEE Electron Device Letters 2002 / 04 Vol. 23; Iss. 4

Abnormal junction profile of silicided p/sup +//n shallow junctions: a leakage mechanism

Chel-Jong Choi,, Tae-Yeon Seong,, Key-Min Lee,, Joo-Hyoung Lee,, Young-Jin Park,, Hi-Deok Lee,
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Volume:
23
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.992834
Date:
April, 2002
File:
PDF, 196 KB
english, 2002
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