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Photothermally induced bromination and decomposition of alkylsiloxane monolayers on surface-oxidized silicon substrates
Klingebiel, Benjamin, Schröter, Anja, Franzka, Steffen, Hartmann, NilsVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3386590
File:
PDF, 660 KB
english, 2010