[IEEE The 16th International Conference on Microelectronics, 2004. ICM 2004. - Tunis, Tunisia (Dec. 6-8, 2004)] Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004. - Study of nitrogen doped silicon films used for p+ polysilicon gates
Bouridah, H., Mansour, F., Mahamdi, R., Temple-Boyer, P.Year:
2004
Language:
english
DOI:
10.1109/icm.2004.1434729
File:
PDF, 508 KB
english, 2004