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Residual stresses and fracture properties of magnetron sputtered Ti films on Si microelements
Ljungcrantz, H., Hultman, L., Sundgren, J.‐E., Johansson, S., Kristensen, N., Schweitz, J.‐Å., Shute, C. J.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578770
Date:
May, 1993
File:
PDF, 1.32 MB
english, 1993