Residual stresses and fracture properties of magnetron...

Residual stresses and fracture properties of magnetron sputtered Ti films on Si microelements

Ljungcrantz, H., Hultman, L., Sundgren, J.‐E., Johansson, S., Kristensen, N., Schweitz, J.‐Å., Shute, C. J.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578770
Date:
May, 1993
File:
PDF, 1.32 MB
english, 1993
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