Simultaneous control of numerical enhancement of N atoms and decrease in heat flux into reaction chamber using Ar–N[sub 2] pulse-modulated induction thermal plasmas
Tanaka, Yasunori, Muroya, Takafumi, Hayashi, Kouhei, Uesugi, YoshihikoVolume:
89
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2226994
File:
PDF, 390 KB
english, 2006