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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars
Il-Joo Cho,, Kwang-Seok Yun,, Hyung-kew Lee,, Jun-Bo Yoon,, Euisik Yoon,Year:
2002
Language:
english
DOI:
10.1109/memsys.2002.984328
File:
PDF, 516 KB
english, 2002