Lamb Waves and Resonant Modes in Rectangular-Bar Silicon...

Journal of Microelectromechanical Systems 2010 / 08 Vol. 19; Iss. 4

Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators

Casinovi, Giorgio, Gao, Xin, Ayazi, Farrokh
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2050862
Date:
August, 2010
File:
PDF, 965 KB
english, 2010
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